Linear Bearings in Clean-Room Robotics: Why Sub-Class 1 ISO Performance Demands More
When a wafer-handling robot glides across a semiconductor clean-room, the linear bearings hidden inside its forearm are expected to deliver repeatability measured in single-digit microns—while generating fewer than ten particles larger than 0.1 µm per meter of travel. Achieving this contradiction between mechanical contact and near-zero contamination is no longer a laboratory...
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